MEMS and microsystems : design and manufacture / by Tai-Ran Hsu.
Material type:![Text](/opac-tmpl/lib/famfamfam/BK.png)
- 9780070487093 (pbk.)
- 007048709X (pbk.)
- 0072393912 (bpk.)
- 621.381 HSU/M
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621.381 HSU/M MEMS and microsystems : | 621.381 HSU/M MEMS and microsystems : | 621.381 HSU/M MEMS and microsystems : | 621.381 HSU/M MEMS and microsystems : | 621.381 HSU/M MEMS and microsystems : | 621.381 HWA/O Oxide nanoelectronics : | 621.381 JAI/M Modern digital electronics / |
Includes bibliographical references and index.
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