Normal view MARC view ISBD view

MEMS and microsystems :

Hsu, Tai-Ran.

MEMS and microsystems : design and manufacture / by Tai-Ran Hsu. - Boston ; New Delhi : McGraw-Hill, c2002. - xii, 436 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 9780070487093 (pbk.) 007048709X (pbk.) 0072393912 (bpk.)

Subjects--Topical Terms:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

Dewey Class. No.: 621.381 / HSU/M

Print
Send to device
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)