Fundamentals of microelectromechanical systems (MEMS) / by Eun Sok Kim.
Material type:![Text](/opac-tmpl/lib/famfamfam/BK.png)
- 9789354601224
- 9354601227
- 621.381 KIM/F
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621.381 KAS/S Springer handbook of electronic and photonic materials / | 621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / | 621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / | 621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / | 621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / | 621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / | 621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / |
Minimal Level Cataloging Plus.
Includes bibliographical references and index.
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