Fundamentals of microelectromechanical systems (MEMS) / by Eun Sok Kim.
Material type: TextLanguage: English Publication details: New Delhi : McGraw Hill, 2021.Description: xviii, 396 pages : ill. ; 25 cmISBN:- 9789354601224
- 9354601227
- 621.381 KIM/F
Minimal Level Cataloging Plus.
Includes bibliographical references and index.
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