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999 _c9930
_d9930
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008 191122b ||||| |||| 00| 0 eng d
020 _a9798188689094
020 _a8188689092
040 _aIN-BhIIT
041 _aeng
082 0 0 _a621.55
_bCHA/B
100 1 _aChambers, A.
_eauthor
_910304
245 1 0 _aBasic vacuum technology /
_cby A. Chambers, R.K. Fitch and B.S. Halliday.
250 _a2nd ed.
260 _aBristol ;
_aPhiladelphia :
_bInstitute of Physics Pub.,
_c2012
300 _axiv, 189 p. :
_bill. ;
_c26 cm.
504 _aIncludes bibliographical references and index.
650 0 _aVacuum technology.
_910294
700 1 _aFitch, R. K.
_eauthor
_910305
700 1 _aHalliday B. S.
_eauthor
_910306
856 4 2 _uhttp://www.loc.gov/catdir/enhancements/fy0661/98020304-d.html
942 _cTB