| 000 | 00974cam a22002894a 4500 | ||
|---|---|---|---|
| 999 |
_c871 _d871 |
||
| 001 | TB1537 | ||
| 003 | IN-BhIIT | ||
| 005 | 20190912154725.0 | ||
| 008 | 190912b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780070487093 (pbk.) | ||
| 020 | _a007048709X (pbk.) | ||
| 020 | _a0072393912 (bpk.) | ||
| 040 | _aIN-BhIIT | ||
| 041 | _aeng | ||
| 082 | 0 | 0 |
_a621.381 _bHSU/M |
| 100 | 1 |
_aHsu, Tai-Ran. _eauthor _99309 |
|
| 245 | 1 | 0 |
_aMEMS and microsystems : _bdesign and manufacture / _cby Tai-Ran Hsu. _6 |
| 260 |
_aBoston ; _aNew Delhi : _bMcGraw-Hill, _cc2002. |
||
| 300 |
_axii, 436 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectronics. _97137 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _91332 |
|
| 650 | 0 |
_aMicroelectronic packaging. _99310 |
|
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/description/mh021/2001044737.html |
| 856 | 4 | 1 | _uhttp://www.loc.gov/catdir/toc/mh021/2001044737.html |
| 942 |
_cTB _014 |
||