000 | 01072cam a22003014a 4500 | ||
---|---|---|---|
001 | 12181154 | ||
005 | 20170322120553.0 | ||
008 | 000921s2001 maua b 001 0 eng | ||
010 | _a 00048768 | ||
020 | _a9788181285461 (pbk.) | ||
020 | _a8181285468 (pbk.) | ||
020 | _a0792372468 (pbk.) | ||
040 |
_aDLC _cDLC _dDLC |
||
042 | _apcc | ||
050 | 0 | 0 |
_aTK7875 _b.S46 2000 |
082 | 0 | 0 |
_a621.381 _221 _bSEN/M |
100 | 1 | _aSenturia, Stephen D., | |
245 | 1 | 0 |
_aMicrosystem design / _cby Stephen D. Senturia. |
260 |
_aBoston / _aNew Delhi : _bKluwer Academic Publishers / _bSpringer, _cc2001. |
||
300 |
_axxvi, 689 p. : _bill. ; _c24 cm. |
||
504 | _aIncludes bibliographical references and index. | ||
650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
650 | 0 | _aSystem design. | |
650 | 0 | _aMicroelectronics. | |
856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-d.html |
856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-t.html |
942 |
_2ddc _cTB _05 |
||
999 |
_c866 _d866 |