| 000 | 00552nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 151218s9999 xx 000 0 und d | ||
| 020 |
_a9780852969984 _c |
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| 040 |
_aCLIITBBS _cCLIITBBS _dCLIITBBS |
||
| 082 | 0 | 0 |
_a621.38152 _222 _bZET/P |
| 100 | _aZetterling, Carl-Mikael | ||
| 245 | 1 | 0 |
_aProcess technology for silicon carbide devices / _b _cby Carl-Mikael Zetterling. |
| 260 |
_aLondon : _bINSPEC, _c2002. |
||
| 300 | _axxii, 176 p. : ill. ; | ||
| 504 | _aInclude Index | ||
| 650 | _aSilicon carbide -- Electric properties | ||
| 942 |
_2ddc _cTRB _02 |
||
| 999 |
_c6539 _d6539 |
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