000			00645nam a2200217Ia 4500
001			6781
003			IN-BhIIT
005			20240906161144.0
008			151218s9999 xx 000 0 und d
020			_a9780387777467
040			_aCLIITBBS
041			_aeng
082	0	0	_a621.381 _bLAN/M
245	1	0	_aMulti-wafer rotating MEMS machines : _bturbines, generators and engines / _cedited by Jeffrey H. Lang.
260			_aNew York : _bSpringer, _c2009.
300			_axv, 456 p. : _b ill. ; _c25 cm.
504			_aIncludes Index.
650			_aMicroelectromechanical systems _91332
700			_aLang, Jeffrey H. _eeditor _924606
942			_cTRB
999			_c6477 _d6477