000 00554nam a2200169Ia 4500
008 151218s9999 xx 000 0 und d
020 _a9783540606581
_cE104.99
040 _aCLIITBBS
_cCLIITBBS
_dCLIITBBS
082 0 0 _a629.892
_222
_bFAT/M
100 _aFatikow, S.
_920213
245 1 0 _aMicrosystem technology and microrobotics /
_b
_cby S. Fatikow.
260 _aBerlin :
_bSpringer,
_c1997.
300 _axii, 408 p. : ill. ;
504 _aInclude Index
650 _aElectromechanical devices - Design and construction
_920214
942 _2ddc
_cTRB
_01
999 _c6453
_d6453