| 000 | 00619nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 151216s9999 xx 000 0 und d | ||
| 020 | _a9781420045680 | ||
| 020 | _cP89.00 | ||
| 082 | _222 | ||
| 082 | _a621.381 | ||
| 082 | _bLIU/P | ||
| 100 | _aLiu, Ai-Qun | ||
| 245 | _aPhotonic MEMS Devices : | ||
| 245 | _b Design, Fabrication and Control / | ||
| 245 | _cby Ai-Qun Liu. | ||
| 260 | _aBoca Raton : | ||
| 260 | _bCRC Press, | ||
| 260 | _c2008. | ||
| 300 | _a483p. : 24cm. | ||
| 504 | _aIncludes Bibliography | ||
| 650 | _aPhotonics ; Microelectromechanical system | ||
| 942 | _2ddc | ||
| 942 | _cTB | ||
| 999 |
_c5487 _d5487 |
||