000 | 01524cam a22003614a 4500 | ||
---|---|---|---|
001 | 16786538 | ||
005 | 20240705093738.0 | ||
008 | 110519s2012 flua b 001 0 eng | ||
010 |
_a 2011014406 _z 2011014404 _z 2011014405 |
||
020 | _a142005516X | ||
020 | _a9781420055115 (v. 1) | ||
020 | _a9781420055191 (v. 2) | ||
020 | _a9781420055160 (v. 3) | ||
035 | _a(OCoLC)ocn727047810 | ||
040 |
_aDLC _cDLC _dYDX _dYDXCP _dCDX _dCOO _dMYPMP _dDLC |
||
042 | _apcc | ||
050 | 0 | 0 |
_aTK7875 _b.M33 2012 |
082 | 0 | 0 |
_a621.3815 _223 _bMAD/F |
084 |
_aTEC027000 _aTEC008070 _aSCI077000 _2bisacsh |
||
100 | 1 |
_aMadou, Marc J. _910101 |
|
245 | 1 | 0 |
_aFundamentals of microfabrication and nanotechnology / _cby Marc J. Madou. |
246 | 3 | 0 | _aSolid-state physics, fluidics, and analytical techniques in micro- and nanotechnology |
250 | _a3rd ed. | ||
260 |
_aBoca Raton, FL : _bCRC Press, _cc2012. |
||
300 |
_a3 vols. : various pagination : _bill. (some col.) ; _c29 cm. |
||
504 | _aIncludes bibliographical references and index. | ||
505 | 0 | _av. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications. | |
650 | 0 |
_aMicroelectromechanical systems. _91332 |
|
650 | 0 |
_aNanoelectromechanical systems. _910666 |
|
650 | 0 |
_aMicrofluidics. _9685 |
|
650 | 0 |
_aSolid-state physics. _9923 |
|
942 |
_2ddc _cTRB _01 |
||
999 |
_c4961 _d4961 |