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999			_c4197 _d4197
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003			IN-BhIIT
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008			200124b ||||| |||| 00| 0 eng d
020			_a9788126517909
040			_aIN-BhIIT
041			_aeng
082			_a621.3815 _bGHA/V
100			_aGhandhi, Sorab Khushro _eauthor _911604
245			_aVLSI fabrication principles : _bsilicon and gallium arsenide / _cby Sorab K. Ghandhi.
250			_a2nd ed.
260			_aNew York : _bJohn Sons. & Wiley, _cc1994.
300			_axxiv, 834 p. : _billustrations ; _c25 cm.
504			_aIncludes bibliographical references and index
650			_aIntegrated circuits--Very large scale integration _93555
650			_aSilicon _911602
650			_aGallium arsenide _911603
942			_02
942			_cTRB