| 000 | 00551nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 151211s9999 xx 000 0 und d | ||
| 020 | _a9780521590549 | ||
| 082 | _222 | ||
| 082 | _a621.3815 | ||
| 082 | _bELW/S | ||
| 100 | _aElwenspoek, M. (Miko) | ||
| 245 | _aSilicon micromachining | ||
| 245 | _cby M. Elwenspoek and H.V. Jansen. | ||
| 260 | _aCambridge ; England | ||
| 260 | _bCambridge University Press | ||
| 260 | _c2004 | ||
| 650 | _aSilicon.; Micromachining.; Etching | ||
| 700 | _aJansen, H. V. | ||
| 942 | _2ddc | ||
| 942 | _cTRB | ||
| 999 |
_c3892 _d3892 |
||