| 000 | 00772cam a22002537i 4500 | ||
|---|---|---|---|
| 001 | TB11027 | ||
| 003 | IN-BhIIT | ||
| 005 | 20240606195356.0 | ||
| 008 | 210322s2021 nyua b 001 0 eng | ||
| 020 | _a9789354601224 | ||
| 020 | _a9354601227 | ||
| 040 | _aIN-BhIIT | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bKIM/F |
||
| 100 | 1 |
_aKim, Eun Sok, _eAuthor. _921300 |
|
| 245 | 1 | 0 |
_aFundamentals of microelectromechanical systems (MEMS) / _cby Eun Sok Kim. |
| 260 |
_aNew Delhi : _bMcGraw Hill, _c2021. |
||
| 300 |
_axviii, 396 pages : _bill. ; _c25 cm |
||
| 500 | _aMinimal Level Cataloging Plus. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _91332 |
|
| 650 | 0 | _aElectrical engineering. | |
| 942 |
_cRES _01 |
||
| 999 |
_c13484 _d13484 |
||