000 00755nam a22002537a 4500
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003 IN-BhIIT
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008 221123b |||||||| |||| 00| 0 eng d
020 _a9783642092749
040 _aIN-BhIIT
041 _aeng
082 _a671.35
_bWON/T
100 _aWong, Basil T.
_eAuthor
_918672
245 _aThermal transport for applications in micro/nanomachining /
_cBasil T. Wong and M. Pinar Menguc
260 _aNew York :
_bSpringer,
_c2008.
300 _axvii, 231 p. :
_bill. ;
_c23 cm.
490 _aMicrotechnology and MEMS
504 _aIncluding references and index.
650 _aNanotechnology
650 _aMachining
_9399
700 _aMenguc, M. Pinar
_eJoint author
_911023
942 _cTRB
999 _c12787
_d12787