000 | 00638nam a22002057a 4500 | ||
---|---|---|---|
001 | 9647 | ||
003 | IN-BhIIT | ||
005 | 20201027155128.0 | ||
008 | 201012b ||||| |||| 00| 0 eng d | ||
020 | _a9781138034198 | ||
040 | _aIN-BhIIT | ||
041 | _aeng | ||
082 |
_a661.0683 _bERA/C |
||
100 |
_aEranna, Golla _eauthor _914396 |
||
245 |
_aCrystal growth and evaluation of silicon for VLSI and ULSI / _cGolla Eranna |
||
260 |
_aBoca Raton : _bCRC Press, _cc2015. |
||
300 |
_axvii, 411 p. : _bill. ; _c26 cm. |
||
650 |
_aSilicon crystals. _aSilicon crystals -- Electric properties. _aCrystal growth. _914397 |
||
942 |
_cTRB _01 |
||
999 |
_c11233 _d11233 |