000 00638nam a22002057a 4500
001 9647
003 IN-BhIIT
005 20201027155128.0
008 201012b ||||| |||| 00| 0 eng d
020 _a9781138034198
040 _aIN-BhIIT
041 _aeng
082 _a661.0683
_bERA/C
100 _aEranna, Golla
_eauthor
_914396
245 _aCrystal growth and evaluation of silicon for VLSI and ULSI /
_cGolla Eranna
260 _aBoca Raton :
_bCRC Press,
_cc2015.
300 _axvii, 411 p. :
_bill. ;
_c26 cm.
650 _aSilicon crystals.
_aSilicon crystals -- Electric properties.
_aCrystal growth.
_914397
942 _cTRB
_01
999 _c11233
_d11233