| 000 | 00987nam a22002777a 4500 | ||
|---|---|---|---|
| 001 | GB7 | ||
| 003 | IN-BhIIT | ||
| 005 | 20200701151458.0 | ||
| 008 | 200701b ||||| |||| 00| 0 eng d | ||
| 020 | _a9789812530721 | ||
| 040 | _aIN-BhIIT | ||
| 041 | _aeng | ||
| 082 | 0 | 0 |
_a621.38152 _bMAY/F |
| 100 | 1 |
_aMay, Gary S. _eAUTHOR _914049 |
|
| 245 | 1 | 0 |
_aFundamentals of semiconductor fabrication / _cGary S. May and Simon M. Sze. |
| 260 |
_aNew York : _bWiley, _cc2004. |
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| 300 |
_axiii, 305 p. : _bill. ; _c26 cm. |
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| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _914050 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _914051 |
|
| 700 | 1 |
_aSze, S. M., _eauthor _914052 |
|
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/bios/wiley044/2003276248.html |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/description/wiley037/2003276248.html |
| 856 | 4 | 1 | _uhttp://www.loc.gov/catdir/toc/wiley032/2003276248.html |
| 942 | _cGB | ||
| 999 |
_c11066 _d11066 |
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