| 000 | 01394cam a22003615i 4500 | ||
|---|---|---|---|
| 999 |
_c10336 _d10336 |
||
| 001 | 9005 | ||
| 003 | IN-BhIIT | ||
| 005 | 20200131163944.0 | ||
| 008 | 150401s2015 ne a b 001 0 eng d | ||
| 020 | _a9780323299657 (hbk.) | ||
| 040 | _aIN-BhIIT | ||
| 041 | _aeng | ||
| 082 | 0 | 4 |
_a621.38152 _bTIL/H |
| 245 | 0 | 0 |
_aHandbook of silicon based MEMS materials and technologies / _cedited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos. |
| 250 | _a2nd ed. | ||
| 260 |
_aLondon : _bElsevier, _cc2015. |
||
| 300 |
_axxxvii, 787 pages : _billustrations ; _c29 cm. |
||
| 490 | 1 | _aMicro & nano technologies series | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _91332 |
|
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials. _911856 |
|
| 650 | 0 |
_aSilicon _xElectric properties. _911857 |
|
| 650 | 7 |
_aMicroelectromechanical systems. _91332 |
|
| 650 | 7 |
_aMicroelectromechanical systems _xMaterials. _911856 |
|
| 650 | 7 |
_aSilicon _xElectric properties. _911857 |
|
| 700 | 1 |
_aMarkku, Tilli, _eauthor _911858 |
|
| 700 | 1 |
_aMotooka, Teruaki _eauthor _911859 |
|
| 700 | 1 |
_aAiraksinen, Veli-Matti _eauthor _911860 |
|
| 700 | 1 |
_aFranssila, Sami _eauthor _911861 |
|
| 700 | 1 |
_aPaulasto-Krockel, Mervi _eauthor _911862 |
|
| 700 | 1 |
_aLindroos, Veikko _eauthor _911863 |
|
| 942 | _cTRB | ||