| 000 | 00667nam a22002177a 4500 | ||
|---|---|---|---|
| 999 |
_c10311 _d10311 |
||
| 001 | 8997 | ||
| 003 | IN-BhIIT | ||
| 005 | 20200127114232.0 | ||
| 008 | 200127b ||||| |||| 00| 0 eng d | ||
| 020 | _a9788126532605 | ||
| 040 | _aIN-BhIIT | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bMAY/F |
||
| 100 |
_aMay, Gary S _eauthor _911741 |
||
| 245 |
_aFundamentals of semiconductor fabrication / _cGary S May and Simon M. Sze |
||
| 260 |
_aNew Delhi : _bWiley, _cc2004. |
||
| 300 |
_axiii, 305p. ; _c24 cm. |
||
| 650 |
_aSemiconductors _aSemiconductor Fabrication _aSemiconductors Design and construction _911742 |
||
| 700 |
_aSze, Simon M. _eauthor _911743 |
||
| 942 | _cTRB | ||