000 01711nam a22002897a 4500
999 _c10130
_d10130
001 8949
003 IN-BhIIT
005 20200111110614.0
008 200111b ||||| |||| 00| 0 eng d
020 _a9781466515819
040 _aIN-BhIIT
041 _aeng
082 0 0 _a621.381
_bCHO/M
245 0 0 _aMEMS :
_bfundamental technology and applications /
_cedited by Vikas Choudhary and Krzysztof Iniewski
300 _axxii, 456 p. :
_billustrations ;
_c27 cm.
490 0 _aDevices, circuits, and systems
504 _aIncludes bibliographical references and index.
520 _a"Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems"--
650 0 _aMicroelectromechanical systems.
_91332
650 0 _aMicroelectronic packaging.
_99310
650 7 _aMEDICAL / Biotechnology
_911195
650 7 _aTECHNOLOGY & ENGINEERING / Electronics / Circuits / General
_911196
650 7 _aTECHNOLOGY & ENGINEERING / Nanotechnology & MEMS
_910199
700 1 _aChoudhary, Vikas
_eeditor
_911197
700 1 _aIniewski, Krzysztof
_eeditor
_911198
942 _cTRB