Microsystem technology and microrobotics / by S. Fatikow.
Material type: TextLanguage: English Publication details: Berlin : Springer, 1997.Description: xii, 408 p. : illISBN:- 9783540606581
- 629.892 FAT/M
Item type | Current library | Home library | Call number | Status | Date due | Barcode | Item holds | |
---|---|---|---|---|---|---|---|---|
Technical Reference Book | Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 629.892 FAT/M (Browse shelf(Opens below)) | Available | 6772 |
Includes Index.
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
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