TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - MEMS and microsystems : : design and manufacture / 
SN  - 9780070487093 (pbk.)
U1  - 621.381 
PY  - 2002///.
CY  - Boston ; , New Delhi : 
PB  - McGraw-Hill, 
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/description/mh021/2001044737.html
UR  - http://www.loc.gov/catdir/toc/mh021/2001044737.html
ER  -