Hsu, Tai-Ran. <br/><br/>
MEMS and microsystems :   design and manufacture /  
by Tai-Ran Hsu.  
 - Boston ;   New Delhi :   McGraw-Hill,   c2002.  
 - xii, 436 p. :   ill. ;   24 cm.  
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780070487093 (pbk.) 007048709X (pbk.) 0072393912 (bpk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Microelectromechanical systems.<br/>Microelectronic packaging.
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU/M