Senturia, Stephen D.,
Microsystem design /
by Stephen D. Senturia.
- Boston / New Delhi : Kluwer Academic Publishers / Springer, c2001.
- xxvi, 689 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9788181285461 (pbk.) 8181285468 (pbk.) 0792372468 (pbk.)
00048768
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.
TK7875 / .S46 2000
621.381 / SEN/M