TY  - BOOK
AU  - Francis, Laurent A.
TI  - Novel advances in microsystems technologies and their applications / 
SN  - 9781466560666
U1  - 621.381 22
PY  - 2014///
CY  - Boca Raton : 
PB  - CRC Press, 
KW  - Microsystems Technologies
N1  - Include Index
ER  -