TY  - BOOK
AU  - Fatikow, S.
TI  - Microsystem technology and microrobotics / 
SN  - 9783540606581
U1  - 629.892 22
PY  - 1997///
CY  - Berlin : 
PB  - Springer, 
KW  - Electromechanical devices - Design and construction
N1  - Include Index
ER  -