Fatikow, S. Microsystem technology and microrobotics / by S. Fatikow. - Berlin : Springer, 1997. - xii, 408 p. : ill. ; Include Index ISBN: 9783540606581 E104.99 Subjects--Topical Terms: Electromechanical devices - Design and construction Dewey Class. No.: 629.892 / FAT/M