TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication
SN  - 9780849308260
CY  - Boca Raton
KW  - Microelectronics. ;  Integrated circuits -- Design and construction. ;  Microelectromechanical systems -- Design and construction. ;  Machining. ;  Microelectronic packaging. ;  Lasers -- Industrial applications
N1  - Includes indexes
ER  -