Madou, Marc J. <br/><br/>
Fundamentals of microfabrication :   the science of miniaturization / 
by Marc J. Madou. 
 - 2nd ed. 
 - Boca Raton :  CRC Press,   2008. 
<br/><br/>Includes indexes. 
<br/><br/><label>ISBN: </label>9780849308260 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics. ;  Integrated circuits -- Design and construction. ;  Microelectromechanical systems -- Design and construction. ;  Machining. ;  Microelectronic packaging. ;  Lasers -- Industrial applications
<br/><br/><label>Dewey Class. No.: </label>621.3815  / MAD/F