Fundamentals of microfabrication and nanotechnology /
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
by Marc J. Madou.
- 3rd ed.
- Boca Raton, FL : CRC Press, c2012.
- 3 vols. : various pagination : ill. (some col.) ; 29 cm.
Includes bibliographical references and index.
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.