TY  - BOOK
AU  - Kim,Eun Sok
TI  - Fundamentals of microelectromechanical systems (MEMS)
SN  - 9789354601224
U1  - 621.381 
PY  - 2021///
CY  - New Delhi
PB  - McGraw Hill
KW  - Microelectromechanical systems
KW  - Electrical engineering
N1  - Minimal Level Cataloging Plus; Includes bibliographical references and index
ER  -