Krishna, Braj Synthesis and nanomechanical characterization of piezoelectric nanocomposite films for applications in energy harvesting MEMS devices / Braj Krishna - Bhubaneswar : IIT BBS, 2022. - xxiii, 152 p. : ill. ; 29 cm. Including references. Subjects--Topical Terms: Nanocomposite filmsLithography Dewey Class. No.: 620.118 / KRI/S