TY  - BOOK
AU  - Eranna, Golla
TI  - Crystal growth and evaluation of silicon for VLSI and ULSI
SN  - 9781138034198
U1  - 661.0683 
PY  - 2015///
CY  - Boca Raton
PB  - CRC Press
KW  - Silicon crystals
KW  - Silicon crystals -- Electric properties.
KW  - Crystal growth
ER  -