Handbook of silicon based MEMS materials and technologies /
edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos.
- 2nd ed.
- London : Elsevier, c2015.
- xxxvii, 787 pages : illustrations ; 29 cm.
- Micro & nano technologies series .