TY  - BOOK
AU  - May, Gary S
AU  - Sze, Simon M.
TI  - Fundamentals of semiconductor fabrication
SN  - 9788126532605
U1  - 621.38152 
PY  - 2004///
CY  - New Delhi
PB  - Wiley
KW  - Semiconductors
KW  - Semiconductor Fabrication
KW  - Semiconductors Design and construction
ER  -