May, Gary S <br/><br/>
Fundamentals of semiconductor fabrication / 
Gary S May and Simon M. Sze 
 - New Delhi :  Wiley,  c2004. 
 - xiii, 305p. ;  24 cm. 
<br/><br/><label>ISBN: </label>9788126532605 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors<br/>Semiconductor Fabrication<br/>Semiconductors Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAY/F