Microsystem design / by Stephen D. Senturia.
Material type: TextPublication details: Boston / New Delhi : Kluwer Academic Publishers / Springer, c2001.Description: xxvi, 689 p. : ill. ; 24 cmISBN:- 9788181285461 (pbk.)
- 8181285468 (pbk.)
- 0792372468 (pbk.)
- 621.381 21 SEN/M
- TK7875 .S46 2000
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621.381 SEN/M Microsystem design / | 621.381 SEN/M Microsystem design / | 621.381 SEN/M Microsystem design / | 621.381 SEN/M Microsystem design / | 621.381 SEN/M Microsystem design / | 621.381 SET/E Electroceramic-based MEMS : | 621.381 SHA/D Digital electronic aevam anuprayoog / |
Includes bibliographical references and index.
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