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Process technology for silicon carbide devices /

Zetterling, Carl-Mikael

Process technology for silicon carbide devices / by Carl-Mikael Zetterling. - London : INSPEC, 2002. - xxii, 176 p. : ill. ;

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ISBN: 9780852969984

Subjects--Topical Terms:
Silicon carbide -- Electric properties

Dewey Class. No.: 621.38152 / ZET/P

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