Normal view MARC view ISBD view

Fundamentals of microfabrication :

Madou, Marc J.

Fundamentals of microfabrication : the science of miniaturization / by Marc J. Madou. - 2nd ed. - Boca Raton : CRC Press, 2008.

Includes indexes.

ISBN: 9780849308260

Subjects--Topical Terms:
Microelectronics. ; Integrated circuits -- Design and construction. ; Microelectromechanical systems -- Design and construction. ; Machining. ; Microelectronic packaging. ; Lasers -- Industrial applications

Dewey Class. No.: 621.3815 / MAD/F

Print
Send to device
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)