Synthesis and nanomechanical characterization of piezoelectric nanocomposite films for applications in energy harvesting MEMS devices /

Krishna, Braj

Synthesis and nanomechanical characterization of piezoelectric nanocomposite films for applications in energy harvesting MEMS devices / Braj Krishna - Bhubaneswar : IIT BBS, 2022. - xxiii, 152 p. : ill. ; 29 cm.

Including references.


Nanocomposite films
Lithography

620.118 / KRI/S

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