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Crystal growth and evaluation of silicon for VLSI and ULSI /

Eranna, Golla

Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna - Boca Raton : CRC Press, c2015. - xvii, 411 p. : ill. ; 26 cm.

ISBN: 9781138034198

Subjects--Topical Terms:
Silicon crystals.
Silicon crystals -- Electric properties.
Crystal growth.

Dewey Class. No.: 661.0683 / ERA/C

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