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Fundamentals of semiconductor fabrication /

May, Gary S.

Fundamentals of semiconductor fabrication / Gary S. May and Simon M. Sze. - New York : Wiley, c2004. - xiii, 305 p. : ill. ; 26 cm.

Includes bibliographical references and index.

ISBN: 9789812530721

Subjects--Topical Terms:
Semiconductors--Design and construction.
Integrated circuits--Design and construction.

Dewey Class. No.: 621.38152 / MAY/F

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