Normal view MARC view ISBD view

Handbook of silicon based MEMS materials and technologies /

Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos. - 2nd ed. - London : Elsevier, c2015. - xxxvii, 787 pages : illustrations ; 29 cm. - Micro & nano technologies series .

Includes bibliographical references and index.

ISBN: 9780323299657 (hbk.)

Subjects--Topical Terms:
Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.
Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.

Dewey Class. No.: 621.38152 / TIL/H

Print
Send to device
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)